Features

TF3 is designed to work rapidly with through-focus EUV aerial images in multi-GB datasets, to get you the data you need, and create output that can be used in presentations and post-processing.

TF3 aligns and normalizes raw data, for export or processing under several well-known metrics. Image analysis is shown with real-time feedback, in the form of intensity profiles, and through-focus curves, as the user places and moves the region of interest within image details. Line analysis can be performed to extract contrast, CD, NILS, LER/LWR, Bossung Plots, Process Window, and more. Contact analysis shows area, size in x and y. Analysis is also available for blank regions and general patterns.

ThroughFocus remembers your settings, image-processing specifications, and region positions from session-to-session so you don’t have to repeat the analysis steps you’ve made, and you can resume analysis right where you left off, previously.

Data can be output in many formats. There are high-quality plots for papers, colorful plots for presentations, and labeled image details with various color palettes. The analyzed data can be output into Excel-readable “CSV” format for compilation and subsequent study.

A new Batch mode add-on package can process an entire day’s worth of data, outputting the data into several different formats, including: TIFF in multi-image (integer) or separate (floating-point) files, PNG, and animated GIFs.

ThroughFocus3 in action
A series studying the shape of contacts under different Illiuminations